ZYLAB Ultrasonic Atomization Pyrolysis CVD System Overview: The ZYLAB Ultrasonic Atomization Pyrolysis CVD System is an advanced thin-film deposition equipment that integrates ultrasonic atomization with chemical vapor deposition (CVD) technology. It employs ultrasonic waves to atomize liquid precursor solutions into uniform micro- or sub-micron droplets, which are then transported by carrier gas into a high-temperature reaction zone. On the substrate surface, the droplets undergo pyrolysis or chemical reactions to form high-quality solid thin films. This technology is particularly suitable for material systems where high-purity gaseous precursors are difficult to obtain or prohibitively expensive. It represents a significant upgrade over conventional CVD and spray pyrolysis methods. Key Features: Wide Range of Precursor Sources & Low CostThe system can utilize inexpensive and readily available liquid metal salt solutions (e.g., nitrates, chlorides, acetates), avoiding costly and hazardous metal-organic gas precursors. Precise Composition ControlMultiple precursor solutions can be mixed in controlled ratios for ultrasonic atomization, enabling precise doping and composition regulation for multicomponent thin films, such as perovskites or ternary cathode materials. Excellent Film UniformityUltrasonic atomization produces fine droplets with narrow size distribution and uniform concentration, resulting in films with consistent thickness and composition. Large Deposition AreaThe system supports large-area uniform deposition, making it ideal for roll-to-roll continuous production processes. Relatively Low Operating TemperatureCompared with conventional CVD, certain materials (e.g., FTO) can be deposited at lower temperatures (450–550°C), reducing thermal stress on substrates. Capability to Fabricate Complex MorphologiesBy adjusting process parameters such as solution concentration, flow rate, and temperature, the system can control thin-film microstructures, including dense, porous, and nanoparticle-based films. Environmentally FriendlyThe system avoids the use of highly toxic metal-organic precursors, and solvents can be recovered and reused, making the process greener and safer. Technical Parameters of Ultrasonic Atomization Pyrolysis CVD System: Component Parameter Specification Ultrasonic Atomizer Device Name Corrosion-Resistant Ultrasonic Atomizer Power Supply Single Phase 220V 50Hz Rated Power 55 W (Atomizer: 35 W, Peristaltic Pump: 20 W) Rated Flow Rate 9 ml/min Peristaltic Pump Head Model WP110 Peristaltic Pump Tube Size φ2 mm (ID) × 1 mm (Wall Thickness) Rotameter (Float Flow Meter) 0.5–8 L/min Solution Tank Capacity 160 ml Atomized Droplet Size 5–10 μm Atomization Frequency 2.4 MHz Device Dimensions (with Metal Rail & Base) 800 mm (L) × 390 mm (H) × 280 mm (D) Device Weight (with Metal Rail & Base) ~10 kg Mini Tube Furnace Device Name Mini Tube Furnace Model O1200-50 Power Supply 220V/50Hz Rated Power 1.2 kW Maximum Temperature 1200℃ Rated Temperature 1150℃ Furnace Chamber Φ80 × 200 mm Device Dimensions 920 mm (L) × 460 mm (H) × 360 mm (D) Sensor Type K-type Thermocouple Recommended Heating Rate 10℃/min Compatible Furnace Tube Sizes Φ25 × 600 mm, Φ50 × 600 mm Device Weight ~23 kg Control System 1. 15 programmable temperature curves 2. 7-inch full-color touch screen 3. Non-linear temperature correction 4. over-temperature alarm, thermocouple failure warning, leakage protection Temperature Accuracy ±1℃ Service & Warranty One-year limited warranty with lifetime support (consumable parts such as processing tubes and O-rings are not covered under warranty and should be ordered separately under related products). Applications: Transparent conductive films (e.g., FTO, ITO) Perovskite solar cells and optoelectronic devices Battery cathode and anode materials Multicomponent oxide thin films Nanostructured coatings for sensors and catalysts Click to See More Content All about Aerosol-Assisted Chemical Vapor Deposition (AACVD) System For More Options on CVD Furnace System Click here [CVD Furnace System] For More Options on High Temperature Furnaces Click here [High Temperature Furnaces Collection] Get In TouchFill out the form below — free quote and professional suggestion will be sent for reference very soon! Name Email* Message Send
